1 Microfluidic system

Microfluidic system is an important part of MEMS. In recent years, with the development of life science, the rapid development of microfluidic system has been further promoted. Micro-injection, micro-analysis system, lab-on-a-chip, etc. Parylene is widely used in microfluidic devices due to its low Young's modulus and liquid/gas permeability, stress-free uniform coverage, and chemical inertness.

1.1 Micro valve

Valve is the basic element to realize fluid control. Traditional micro-valve can be divided into passive valve and active valve. A thermally actuated microvalve was fabricated by X. Yang et al. The composite film composed of silicone rubber and parylene film can effectively prevent the leakage of steam, and at the same time ensure that the film has a large stroke.

1.2 Micropump

Micropump is an important executive device of microfluidic system. According to whether it has a movable valve plate, micropumps can be divided into valved micropumps and valveless micropumps. A one-way valve type piezoelectrically driven micropump, the diaphragm is designed to be arched by paraffin molding technology, and the microvalve and diaphragm are made of polymer parylene, which ensures the larger deformation of the diaphragm to produce a larger pump delivery efficiency.

1.3 Microchannel

H.S.Noh et al. used the thermal bonding process of Parylene to fabricate Parylene microchannels. First, deep reactive ion etching was used to fabricate silicon microchannels, and then Parylene C was deposited on the silicon microchannels. At the same time, Parylene was deposited on pure iron sheets. Gold electrodes were fabricated on it. Finally, Parylene was bonded in a vacuum box at 200 °C, the pure iron sheets were stripped off, and the Parylene microchannels were released by lift2off process. Through this method, Parylene microchannels can be fabricated quickly and at low cost, and good Parylene microchannels can be obtained through the release process. At the same time, silicon molds can be reused, which is widely used in gas chromatography and other microfluidic system analysis.

Maqi Nano Technology Co., Ltd. is a high-tech enterprise specializing in the research, development, sales and production of Parylene vacuum coating equipment and its services. If you want to know more about Parylene coating technology, please come to consult!